12E-1 Accelerometer Based on Thin-Film Bulk Acoustic Wave Resonators

A 230MHz CMOS-MEMS bulk acoustic wave resonator

A CMOS-MEMS filter using a V-coupler and electrical phase inversion

A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam Resonators

A Novel Architecture for Differential Resonant Sensing

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

artículo científico publicado en 2006

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction

artículo científico publicado en 2006

A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators

A monolithically integrated torsional CMOS-MEMS relay

A new method to perform in situ current voltage curves with an electrochemical scanning tunnelling microscope

AFM lithography of aluminum for fabrication of nanomechanical systems

artículo científico publicado en 2003

An integrated implantable electrical sacral root stimulator for bladder control.

artículo científico publicado en 2002

Analysis of Mutually Injection-Locked Oscillators for Differential Resonant Sensing

Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Band-pass transimpedance read-out circuit for UHF MEMS resonator applications

Breakdown of SiO2 films in VLSI MOS structures

CMOS Cantilever-based Oscillator for Attogram Mass Sensing

CMOS-MEMS switches based on back-end metal layers

CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

CMOS-SOI platform for monolithic integration of crystalline silicon MEMS

CMOS–MEMS resonators: From devices to applications

Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator

Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

Characterization of antiresonant reflecting optical waveguide devices by scanning near-field optical microscopy.

artículo científico publicado en 2000

Compact CMOS current conveyor for integrated NEMS resonators

Cross coupled beams CMOS–MEMS resonator for VHF range with enhanced electrostatic detection

article published in 2011

Degradation and Breakdown of Gate Oxides in VLSI Devices

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

article by J. Verd et al published June 2005 in IEEE Journal of Microelectromechanical Systems

Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode

Effects of the field dependent occupation of electrical-stress-generated traps on the conduction and breakdown of thin SiO/sub 2/ films

Electrical detection of multiple resonant modes in a CMOS–MEMS cantilever

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Electrochemical modifications at the nanometer scale on Si(100) surfaces with Scanning Tunnelling Microscopy

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

article

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

artículo científico publicado en 2016

Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

article published in 2004

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

Field induced nanomodification on silicon (100) with scanning tunneling microscopy

article published in 1995

Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

Fully CMOS integrated low voltage 100 MHz MEMS resonator

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

Harvester-on-chip: Design of a proof of concept prototype

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

artículo científico publicado en 2018

High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

High-sensitivity capacitive sensing interfacing circuit for monolithic CMOS M/NEMS resonators

Improved behavioral and design model of an Nth-order charge pump

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Integrated tunneling sensor for nanoelectromechanical systems

Integration of NEMS resonators in a 65nm CMOS technology

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

article published in 2008

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Light propagation studies on laser modified waveguides using scanning near-field optical microscopy

Linear operation of a 11MHz CMOS-MEMS resonator

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

article

Measuring electrical current during scanning probe oxidation

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

artículo científico publicado en 2011

Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays

artículo científico publicado en 2020

Mixing in a 220MHz CMOS-MEMS

Modification of HF‐treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions

article published in 1992

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

article published in 2008

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

scholarly article by Z.J. Davis et al published August 2003 in Sensors and Actuators A

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions

article

Morphologic and spectroscopic characterization of porous PtGaAs Schottky diodes by scanning tunnelling microscopy

Multi-Frequency Resonance Behaviour of a Si FractalNEMS Resonator

artículo científico publicado en 2020

NEMS Switches Monolithically Fabricated on CMOS MIM Capacitors

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

artículo científico publicado en 2009

Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

Nanometer scale lithography of silicon(100) surfaces using tapping mode atomic force microscopy

Nanoscale Modification of H-Terminated n-Si(100) Surfaces in Aqueous Solutions with an in Situ Electrochemical Scanning Tunneling Microscope

Novel SU-8 based vacuum wafer-level packaging for MEMS devices

On the SiOx transition layer in abrupt Si-SiO2 chemical interface in MOS structures

On the SiSiO2 interface roughness in VLSIMOS structures

On the breakdown statistics of thin SiO/sub 2/ films

On the breakdown statistics of very thin SiO2 films

On the oxide interface micro-roughness in MOS devices

On the three-dimensional scanning tunneling microscopy formalism

Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

Optimization of the Close-to-Carrier Phase Noise in a CMOS-MEMS Oscillator Using a Phase Tunable Sustaining-Amplifier.

artículo científico publicado en 2017

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

Packaged CMOS–MEMS free–free beam oscillator

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Proposal for measurement of repulsive Casimir forces using silicon membranes

Resonating cantilever mass sensor with mechanical on-plane excitation

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

SOI-silicon as structural layer for NEMS applications

Scanning near-field optical microscope for the characterization of optical integrated waveguides

Simple STM theory

article by Nuria Barniol et al published January 1990 in Vacuum

Single-Resonator Dual-Frequency BEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core

SiSiO2 interfacial atomic scale roughness caused by inhomogeneous thermal oxidation

The Thermal Growth of Very Thin SiO2 Films A Diffusion-Controlled Process

The measurement of the tip current noise as a method to characterize the exposed area of coated ESTM tips

Thin-Film Bulk Acoustic Wave Resonator Floating Above CMOS Substrate

Third-mode 48MHz free–free beam resonator used as a RF balun

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

artículo científico publicado en 2015

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

artículo científico publicado en 2015

Ultimate Limits of Differential Resonant MEMS Sensors Based on Two Coupled Linear Resonators

scientific article published on 10 September 2018

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator

VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator

Zero-level packaging of MEMS in standard CMOS technology