3C-SiC films on insulated substrates for high-temperature electrostatic-based resonators

A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam Resonators

A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

artículo científico publicado en 2006

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction

artículo científico publicado en 2006

A new method to perform in situ current voltage curves with an electrochemical scanning tunnelling microscope

A platform for monolithic CMOS-MEMS integration on SOI wafers

AFM lithography of aluminum for fabrication of nanomechanical systems

artículo científico publicado en 2003

An analytical model for the opto-thermo-mechanical conversion mechanisms in a MOEMS-based energy harvester

Buckling suspended graphene nanoribbons to harvest energy from noisy vibrations

article

CMOS Cantilever-based Oscillator for Attogram Mass Sensing

CMOS-SOI platform for monolithic integration of crystalline silicon MEMS

Combined laser and atomic force microscope lithography on aluminum: Mask fabrication for nanoelectromechanical systems

scholarly article by Gabriel Abadal et al published 24 May 1999 in Applied Physics Letters

Compact CMOS current conveyor for integrated NEMS resonators

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

article by J. Verd et al published June 2005 in IEEE Journal of Microelectromechanical Systems

Diffractive characterization of the vibrational state of an array of microcantilevers

article

Electrical detection of multiple resonant modes in a CMOS–MEMS cantilever

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Electrochemical modifications at the nanometer scale on Si(100) surfaces with Scanning Tunnelling Microscopy

Electrochemical platinum coatings for improving performance of implantable microelectrode arrays

artículo científico publicado en 2002

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

article

Fabrication and characterization of nanoresonating devices for mass detection

article by Z. J. Davis et al published 2000 in Journal of vacuum science & technology. an official journal of the American Vacuum Society. B, Microelectronics processing and phenomena

Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

article published in 2004

Fabrication of highly regular suspended graphene nanoribbons through a one-step electron beam lithography process

Fabrication of monocrystalline 3C–SiC resonators for MHz frequency sensors applications

Field induced nanomodification on silicon (100) with scanning tunneling microscopy

article published in 1995

Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM

Fully CMOS integrated low voltage 100 MHz MEMS resonator

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

Harvester-on-chip: Design of a proof of concept prototype

Heterogeneous Integration of Autonomous Systems in Package for Wireless Sensor Networks

High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

High-sensitivity capacitive sensing interfacing circuit for monolithic CMOS M/NEMS resonators

Inducing bistability with local electret technology in a microcantilever based non-linear vibration energy harvester

article

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Integrated tunneling sensor for nanoelectromechanical systems

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

article published in 2008

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Light propagation studies on laser modified waveguides using scanning near-field optical microscopy

Local modification of n-Si(100) surface in aqueous solutions under anodic and cathodic potential polarization with an in situ scanning tunneling microscope

article published in 1995

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

article

Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

Mixing in a 220MHz CMOS-MEMS

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

article published in 2008

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

scholarly article by Z.J. Davis et al published August 2003 in Sensors and Actuators A

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions

article

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

artículo científico publicado en 2009

Nanomechanical mass sensor for monitoring deposition rates through confined apertures

Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

Nanometer scale lithography of silicon(100) surfaces using tapping mode atomic force microscopy

Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

scholarly article published 29 April 2003

Nanoporous silicalite-only cantilevers as micromechanical sensors: Fabrication, resonance response and VOCs sensing performance

Nanoscale Modification of H-Terminated n-Si(100) Surfaces in Aqueous Solutions with an in Situ Electrochemical Scanning Tunneling Microscope

Nanostructured graphene for energy harvesting

scholarly article in Physical Review B, vol. 84 no. 16, October 2011

Noise energy harvesting in buckled BN nanoribbons from molecular dynamics

Nonlinear Dynamics of an Ambient Noise Driven Array of Coupled Graphene Nanostructured Devices for Energy Harvesting

Novel SU-8 based vacuum wafer-level packaging for MEMS devices

Novel optimized design of a piezoelectric energy harvester in a package for low amplitude vibrations

article

Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

Opto-thermal actuation in double layer polymer microcantilevers

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

Piezoelectric monolayers as nonlinear energy harvesters.

artículo científico publicado en 2014

Predictive model for scanned probe oxidation kinetics

Preface

Preface

Proposal for measurement of repulsive Casimir forces using silicon membranes

Resonating cantilever mass sensor with mechanical on-plane excitation

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Self-suspended vibration-driven energy harvesting chip for power density maximization

article

SiC on SOI Resonators: A Route for Electrically Driven MEMS in Harsh Environment

SnO[sub 2](Sb) Electrodes: Morphological Changes Due to Polarizations in the HER and OER Potential Regions Studied by In Situ STM and Ex Situ AFM Imaging

Storing Deformation Energy of ZnO fine wires in a Mechanical Battery

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

The measurement of the tip current noise as a method to characterize the exposed area of coated ESTM tips

Third-mode 48MHz free–free beam resonator used as a RF balun

Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

artículo científico publicado en 2015

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator

Vibration energy harvesting via parametrically-induced bistability

article

Zero-level packaging of MEMS in standard CMOS technology