Lista de obras - Michele Perego - Dominio Público Uruguay

Atomic Layer Deposition of NiO Films on Si(100) Using Cyclopentadienyl-Type Compounds and Ozone as Precursors

Atomic oxygen-assisted molecular beam deposition of Gd2O3 films for ultra-scaled Ge-based electronic devices

Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing method.

artículo científico publicado en 2014

Characterization of ultra-thin polymeric films by Gas chromatography-Mass spectrometry hyphenated to thermogravimetry

artículo científico publicado en 2014

Chemical and Structural Properties of a TaN/HfO[sub 2] Gate Stack Processed Using Atomic Vapor Deposition

Collective behavior of block copolymer thin films within periodic topographical structures

artículo científico publicado en 2013

Composition of ultrathin binary polymer brushes by thermogravimetry-gas chromatography-mass spectrometry

artículo científico publicado en 2016

Conductive-filament switching analysis and self-accelerated thermal dissolution model for reset in NiO-based RRAM

article

Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers.

artículo científico publicado en 2017

Detrimental impact of technological processes on BTI reliability of advanced high-K/metal gate stacks

Dielectric properties of Er−doped HfO2 (Er∼15%) grown by atomic layer deposition for high-κ gate stacks

article published in 2010

Effect of Entrapped Solvent on the Evolution of Lateral Order in Self-Assembled P(S-r-MMA)/PS-b-PMMA Systems with Different Thicknesses.

artículo científico publicado en 2017

Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers

scientific article published on 30 January 2020

Electroluminescence from C- and Si- rich silicon oxides in continuous wave and pulsed excitation

Enhanced Lateral Ordering in Cylinder Forming PS-b-PMMA Block Copolymers Exploiting the Entrapped Solvent

artículo científico publicado en 2016

Evolution of lateral ordering in symmetric block copolymer thin films upon rapid thermal processing

artículo científico publicado en 2014

Fabrication of periodic arrays of metallic nanoparticles by block copolymer templates on HfO2substrates

scientific article published on 07 May 2015

Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing

artículo científico publicado en 2014

Flash grafting of functional random copolymers for surface neutralization

Focus on sub-10 nm nanofabrication

artículo científico publicado en 2018

GISAXS Analysis of the In-Depth Morphology of Thick PS-b-PMMA Films.

artículo científico publicado en 2017

Hierarchical Order in Dewetted Block Copolymer Thin Films on Chemically Patterned Surfaces

artículo científico publicado en 2018

High Aspect Ratio PS-b-PMMA Block Copolymer Masks for Lithographic Applications

scientific article published on 20 November 2014

In-plane organization of silicon nanocrystals embedded in SiO2 thin films.

artículo científico publicado en 2013

Interface Study in a "Metal / High-k" Gate Stack: Tantalum Nitride on Hafnium Oxide

scholarly article published 2008

Magnetic hysteresis in array of magnetic nanostructures by block copolymers

Mechanisms for Substrate-Enhanced Growth during the Early Stages of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces

Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA

artículo científico publicado en 2010

Micrometer-Scale Ordering of Silicon-Containing Block Copolymer Thin Films via High-Temperature Thermal Treatments

artículo científico publicado en 2016

Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO2 thin films.

artículo científico publicado en 2016

Neutral wetting brush layers for block copolymer thin films using homopolymer blends processed at high temperatures.

artículo científico publicado en 2015

O3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates

On the Thermal Stability of PS-b-PMMA Block and P(S-r-MMA) Random Copolymers for Nanopatterning Applications

Ordering dynamics in symmetric PS-b-PMMA diblock copolymer thin films during rapid thermal processing

Ozone-Based Sequential Infiltration Synthesis of Al2O3 Nanostructures in Symmetric Block Copolymer.

artículo científico publicado en 2016

Phosphorus doping of ultra-small silicon nanocrystals

artículo científico publicado en 2009

Rapid thermal processing of self-assembling block copolymer thin films

scientific article published on 12 July 2013

Rare earth-based high-k materials for non-volatile memory applications

Resistance switching in amorphous and crystalline binary oxides grown by electron beam evaporation and atomic layer deposition

Resistive switching in high-density nanodevices fabricated by block copolymer self-assembly

artículo científico publicado en 2015

Role of oxygen vacancies on the structure and density of states of iron-doped zirconia

scholarly article in Physical Review B, vol. 87 no. 8, February 2013

Scaling of correlation length in lamellae forming PS-b-PMMA thin films upon high temperature rapid thermal treatments

Si nanocrystal synthesis in HfO2/SiO/HfO2multilayer structures

artículo científico publicado en 2009

Si surface passivation by Al2O3 thin films deposited using a low thermal budget atomic layer deposition process

Solid-state dewetting of ultra-thin Au films on SiO2and HfO2

artículo científico publicado en 2014

Structural and electrical properties of Er-doped HfO2 and of its interface with Ge (001)

Study of the interfaces in resistive switching NiO thin films deposited by both ALD and e-beam coupled with different electrodes (Si, Ni, Pt, W, TiN)

Synthesis and characterization of P δ-layer in SiO2 by monolayer doping

artículo científico publicado en 2016

The effect of random copolymer on the characteristic dimensions of cylinder-forming PS-b-PMMA thin films

artículo científico publicado en 2011

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

artículo científico publicado en 2011

The interface between Gd2O3 films and Ge(001): A comparative study between molecular and atomic oxygen mediated growths

Thermal stability of functional P(S-r-MMA) random copolymers for nanolithographic applications

artículo científico publicado en 2015

Thermally induced orientational flipping of cylindrical phase diblock copolymers

Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)

Thermally induced self-assembly of cylindrical nanodomains in low molecular weight PS-b-PMMA thin films

artículo científico publicado en 2014

Thermodynamic stability of high phosphorus concentration in silicon nanostructures.

artículo científico publicado en 2015

Thermodynamics and ordering kinetics in asymmetric PS-b-PMMA block copolymer thin films

artículo científico publicado en 2020

Thickness and Microdomain Orientation of Asymmetric PS-b-PMMA Block Copolymer Films Inside Periodic Gratings

artículo científico publicado en 2015

Toward Lateral Length Standards at the Nanoscale Based on Diblock Copolymers

artículo científico publicado en 2017

Ultrathin Random Copolymer-Grafted Layers for Block Copolymer Self-Assembly

artículo científico publicado en 2015

Understanding of the thermal stability of the hafnium oxide/TiN stack via 2 “high k” and 2 metal deposition techniques

scholarly article by V. Cosnier et al published September 2007 in Microelectronic Engineering

Lista de obras de Michele Perego

Atomic Layer Deposition of NiO Films on Si(100) Using Cyclopentadienyl-Type Compounds and Ozone as Precursors

Atomic oxygen-assisted molecular beam deposition of Gd2O3 films for ultra-scaled Ge-based electronic devices

Behavior of phosphorous and contaminants from molecular doping combined with a conventional spike annealing method.

Characterization of ultra-thin polymeric films by Gas chromatography-Mass spectrometry hyphenated to thermogravimetry

Chemical and Structural Properties of a TaN/HfO[sub 2] Gate Stack Processed Using Atomic Vapor Deposition

Collective behavior of block copolymer thin films within periodic topographical structures

Composition of ultrathin binary polymer brushes by thermogravimetry-gas chromatography-mass spectrometry

Conductive-filament switching analysis and self-accelerated thermal dissolution model for reset in NiO-based RRAM

Control of Doping Level in Semiconductors via Self-Limited Grafting of Phosphorus End-Terminated Polymers.

Detrimental impact of technological processes on BTI reliability of advanced high-K/metal gate stacks

Dielectric properties of Er−doped HfO2 (Er∼15%) grown by atomic layer deposition for high-κ gate stacks

Effect of Entrapped Solvent on the Evolution of Lateral Order in Self-Assembled P(S-r-MMA)/PS-b-PMMA Systems with Different Thicknesses.

Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers

Electroluminescence from C- and Si- rich silicon oxides in continuous wave and pulsed excitation

Enhanced Lateral Ordering in Cylinder Forming PS-b-PMMA Block Copolymers Exploiting the Entrapped Solvent

Evolution of lateral ordering in symmetric block copolymer thin films upon rapid thermal processing

Fabrication of periodic arrays of metallic nanoparticles by block copolymer templates on HfO2substrates

Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing

Flash grafting of functional random copolymers for surface neutralization

Focus on sub-10 nm nanofabrication

GISAXS Analysis of the In-Depth Morphology of Thick PS-b-PMMA Films.

Hierarchical Order in Dewetted Block Copolymer Thin Films on Chemically Patterned Surfaces

High Aspect Ratio PS-b-PMMA Block Copolymer Masks for Lithographic Applications

In-plane organization of silicon nanocrystals embedded in SiO2 thin films.

Interface Study in a "Metal / High-k" Gate Stack: Tantalum Nitride on Hafnium Oxide

Magnetic hysteresis in array of magnetic nanostructures by block copolymers

Mechanisms for Substrate-Enhanced Growth during the Early Stages of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces

Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA

Micrometer-Scale Ordering of Silicon-Containing Block Copolymer Thin Films via High-Temperature Thermal Treatments

Nanoscale control of Si nanoparticles within a 2D hexagonal array embedded in SiO2 thin films.

Neutral wetting brush layers for block copolymer thin films using homopolymer blends processed at high temperatures.

O3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates

On the Thermal Stability of PS-b-PMMA Block and P(S-r-MMA) Random Copolymers for Nanopatterning Applications

Ordering dynamics in symmetric PS-b-PMMA diblock copolymer thin films during rapid thermal processing

Ozone-Based Sequential Infiltration Synthesis of Al2O3 Nanostructures in Symmetric Block Copolymer.

Phosphorus doping of ultra-small silicon nanocrystals

Rapid thermal processing of self-assembling block copolymer thin films

Rare earth-based high-k materials for non-volatile memory applications

Resistance switching in amorphous and crystalline binary oxides grown by electron beam evaporation and atomic layer deposition

Resistive switching in high-density nanodevices fabricated by block copolymer self-assembly

Role of oxygen vacancies on the structure and density of states of iron-doped zirconia

Scaling of correlation length in lamellae forming PS-b-PMMA thin films upon high temperature rapid thermal treatments

Si nanocrystal synthesis in HfO2/SiO/HfO2multilayer structures

Si surface passivation by Al2O3 thin films deposited using a low thermal budget atomic layer deposition process

Solid-state dewetting of ultra-thin Au films on SiO2and HfO2

Structural and electrical properties of Er-doped HfO2 and of its interface with Ge (001)

Study of the interfaces in resistive switching NiO thin films deposited by both ALD and e-beam coupled with different electrodes (Si, Ni, Pt, W, TiN)

Synthesis and characterization of P δ-layer in SiO2 by monolayer doping

The effect of random copolymer on the characteristic dimensions of cylinder-forming PS-b-PMMA thin films

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

The interface between Gd2O3 films and Ge(001): A comparative study between molecular and atomic oxygen mediated growths

Thermal stability of functional P(S-r-MMA) random copolymers for nanolithographic applications

Thermally induced orientational flipping of cylindrical phase diblock copolymers

Thermally induced permittivity enhancement in La-doped ZrO2 grown by atomic layer deposition on Ge(100)

Thermally induced self-assembly of cylindrical nanodomains in low molecular weight PS-b-PMMA thin films

Thermodynamic stability of high phosphorus concentration in silicon nanostructures.

Thermodynamics and ordering kinetics in asymmetric PS-b-PMMA block copolymer thin films

Thickness and Microdomain Orientation of Asymmetric PS-b-PMMA Block Copolymer Films Inside Periodic Gratings

Toward Lateral Length Standards at the Nanoscale Based on Diblock Copolymers

Ultrathin Random Copolymer-Grafted Layers for Block Copolymer Self-Assembly

Understanding of the thermal stability of the hafnium oxide/TiN stack via 2 “high k” and 2 metal deposition techniques