Lista de obras -

20-nm resolution x-ray microscopy demonstrated by use of multilayer test structures [corrected].

artículo científico publicado en 2003

A route for fabricating printable photonic devices with sub-10 nm resolution ⬇️

artículo científico publicado el 22 de enero de 2013

Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features

scientific article published on 16 July 2018

Complex Materials by Atomic Layer Deposition.

artículo científico publicado en 2015

Cross-linked Polymer Replica of a Nanoimprint Mold at 30 nm Half-pitch

artículo científico publicado en 2005

Electrostatic force assisted exfoliation of prepatterned few-layer graphenes into device sites.

artículo científico publicado en 2009

Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography

article

Formation of bandgap and subbands in graphene nanomeshes with sub-10 nm ribbon width fabricated via nanoimprint lithography

artículo científico publicado en 2010

Fundamental understanding of chemical processes in extreme ultraviolet resist materials

article

Harnessing entropic and enthalpic contributions to create a negative tone chemically amplified molecular resist for high-resolution lithography

artículo científico publicado en 2014

High aspect ratio sub-15 nm silicon trenches from block copolymer templates

artículo científico publicado en 2012

Improved pattern transfer in nanoimprint lithography at 30 nm half-pitch by substrate-surface functionalization

artículo científico publicado en 2005

Interface segregating fluoralkyl-modified polymers for high-fidelity block copolymer nanoimprint lithography.

artículo científico publicado en 2011

Investigation of phonon coherence and backscattering using silicon nanomeshes

artículo científico publicado en 2017

Low temperature dry etching of chromium towards control at sub-5 nm dimensions

artículo científico publicado en 2016

Low-temperature plasma etching of high aspect-ratio densely packed 15 to sub-10 nm silicon features derived from PS-PDMS block copolymer patterns

artículo científico publicado en 2014

Nanoimprint-induced molecular stacking and pattern stabilization in a solution-processed subphthalocyanine film

artículo científico publicado en 2010

Nanoscale molecular-switch devices fabricated by imprint lithography

Polymer-metal coating for high contrast SEM cross sections at the deep nanoscale

artículo científico publicado en 2018

Probe field enhancement in photonic crystals by upconversion nanoparticles

Resist Materials for Extreme Ultraviolet Lithography: Toward Low-Cost Single-Digit-Nanometer Patterning